General information

• Investigation area

  Electron Microscopy
• Techniques

  Coating
  
• Manufacturer

  Leica
• Fabrication year

  2025
• Measured quantity

  Deposition of layers with precise thickness (Measurement using oscillating quartz).
• Main application

  Coating with Carbon and Chromium at the moment. Further materials possible upon availability of sputter targets.
• Facility

  Access to this instrument is possible via the MAPEX Core Facility for Materials Analytics

Instrument specification

• Technical aspects

  This instrument allows to deposit ultrathin chromium (or any other available sputter target material) or carbon layers with thicknesses down to about 0.5 nm onto specimens with lateral size of several centimeters.

  A variety of functionalities of Leica sputter coater ACE600 are:

  • Pulsed carbon-wire deposition: with about 0.5nm film deposition per pulse
  • Deposition of two materials without break of vacuum
  • Bayonet lock for quick exchange of sputtering targets
  • Rotating specimen holder for homogenous coating of rough and porous samples
  • Front loading of samples enabling the coating of large samples (4-inch wafers)
  • Thickness determination monitor using an oscillating quartz
  • High vacuum coater (<2*10^-6 mbar)

Contact

• Application scientist

  Marco Schowalter
  Fachbereich 1
  NW1, M4180
  Phone number 042121862263
  schowalterprotect me ?!ifp.uni-bremenprotect me ?!.de
• Eva-Maria Meyer
  Fachbereich 1
  NW1 / O 01120
  Phone number 421 218 62617
  emeyerprotect me ?!imsas.uni-bremenprotect me ?!.de
• Principal investigator

  Marco Schowalter
  Thorsten Mehrtens
  

Instrument location

• Group

  IFP
• Building

  NW1
• Room

  O00800
• Faculty

  Fachbereich 1
• Institute University

  IMSAS