Allgemeine Informationen

• Untersuchungsgebiete

  Electron Microscopy
• Techniken

  Coating
  
• Hersteller

  Leica
• Herstellungsjahr

  2025
• Gemessene Gr??e

  Deposition of layers with precise thickness (Measurement using oscillating quartz).
• Hauptanwendung

  Coating with Carbon and Chromium at the moment. Further materials possible upon availability of sputter targets.
• Einrichtung

  Der Zugang zu diesem Ger?t ist über die MAPEX Core Facility for Materials Analytics m?glich.

Spezifikationen des Ger?ts

• Technische Aspkete

  This instrument allows to deposit ultrathin chromium (or any other available sputter target material) or carbon layers with thicknesses down to about 0.5 nm onto specimens with lateral size of several centimeters.

  A variety of functionalities of Leica sputter coater ACE600 are:

  • Pulsed carbon-wire deposition: with about 0.5nm film deposition per pulse
  • Deposition of two materials without break of vacuum
  • Bayonet lock for quick exchange of sputtering targets
  • Rotating specimen holder for homogenous coating of rough and porous samples
  • Front loading of samples enabling the coating of large samples (4-inch wafers)
  • Thickness determination monitor using an oscillating quartz
  • High vacuum coater (<2*10^-6 mbar)

Kontaktperson

• Anwendungswissenschaftler

  Marco Schowalter
  Fachbereich 1
  NW1, M4180
  Telefonnummer 042121862263
  schowalterprotect me ?!ifp.uni-bremenprotect me ?!.de
• Eva-Maria Meyer
  Fachbereich 1
  NW1 / O 01120
  Telefonnummer 421 218 62617
  emeyerprotect me ?!imsas.uni-bremenprotect me ?!.de
• Führender Anwendungswissenschaftler

  Marco Schowalter
  Thorsten Mehrtens
  

Ger?testandort

• Gruppe

  IFP
• Geb?ude

  NW1
• Raum

  O00800
• Fachbereich

  Fachbereich 1
• Institut Der Universit?t Bremen

  IMSAS